The Micropole™ Residual Gas Analyzer is one of the smallest complete mass spectrometer systems available. The compact size is achieved by the patented design of miniature array of quadrupole mass filters. The array offers similar or greater sensitivity than conventional mass spectrometers but in a fraction of the volume. The system is capable of operating at much higher pressures than traditional systems, so the need for additional differential pumping equipment is reduced.
The sensors are factory pre-tuned and calibrated against transfer standards which allows direct interchangeability of the sensor by the user without the need for technical expertise to calibrate.
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It is possible to take data without a PC when you use the Monitor Controller with 3.5" LCD. Up to eight Micropole systems can be networked and controlled using RS-485 or Ethernet communication.
Download the PDF datasheet from here!
As an integral part of the vacuum equipment, the Micropole™ qualifies tools for process and provides real time control of vacuum processes. By increasing tool uptime and reducing scrap products the Micropole™ helps improve productivity in manufacturing facilities. Typical applications of the Micropole™ mass spectrometer RGA : Semiconductor Wafer Fabrication - Physical Vapor Deposition - Magnetic/Optical Storage Media - Industrial Vacuum Processes - Vacuum Research and Development - Glass/Optical Coating - Particle Accelerators. The Micropole™ can double up as an on board helium leak detector and by using extra quadrupole heads can be used on other vacuum systems in the vicinity without breaking vacuum on the chambers it is mounted to. It is an economical way to have a leak detector capability that can be shared among several labs.
(This chart belongs to the old generation Micropole™ ! The new generation currently is available only for 65amu & 100amu)
PlasmGuard (SMPA)* |
SMPA-1-2/45 |
SMPA-11-2/45 |
SMPA-7-2/65 |
SMPA-5-2/65 |
SMPA-5-2/100 |
SMPA-1-4/300 |
Micropole Analyzer (MPA)* |
MPA6-1-2/45 |
MPA6-11-2/45 |
MPA6-7-2/65 |
MPA6-5-2/65 |
MPA6-5-2/100 |
MPA6-1-4/300 |
Mass Range (AMU)*** |
2~45 |
2~45 |
2~65 |
2~65 |
2~100 |
4~300 |
Resolution (FWHM) |
0.5 AMU |
1.5 AMU |
0.9 AMU |
0.8 AMU |
1 AMU |
1.5 AMU |
Maximum Operating Pressure N2 |
0.133 Pa |
1.466 Pa |
0.933 Pa |
0.666 Pa |
0.666 Pa |
0.133 Pa |
Minimum Detectable Partial Pressure for Slow Scan Updates |
1.33*10-8 Pa N2 |
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Fastest Scan Updates / AMU |
0.6 sec |
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Minimum Detectable He Leak Rate |
2*10-9 Pa m3/sec |
2*10-8 Pa m3/sec |
2*10-9 Pa m3/sec |
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Filament Material |
Y2O3/lr (standard) or Pure W |
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Maximum Operating Temperature |
150°C (Max. bake out temperature : 350°C |
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Flange |
Type C: mini CF Flange |
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Spectra Converter Type** |
SC6-18 |
SC6-14 |
SC6-11 |
SC6-07 |
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Digital Interface |
RS232C / RS485 (Selected Baud Rate : 9,600 / 19,200 / 38,400 |
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Software |
WinMPA (Microsoft Windows XP, 2000, ME, NT4.0, 95/98) |
* Micropole™ Analyzer has two types (MPA / SMPA). SMPA is
protected by a mesh, on the vacuum fitting, designed to extend
the lifetime of the sensor in harsh environments such as plasma
processes.
** Chose electron energy, 70eV or 43eV through PC
*** AMU:
Atomic Mass Unit