BeamlineScience

Cutting-Edge Instrumentation Since 1988

Residual Gas Analyzer

New Generation Micropole™ RGA .

The Micropole™ Residual Gas Analyzer is one of the smallest complete mass spectrometer systems available. The compact size is achieved by the patented design of miniature array of quadrupole mass filters. The array offers similar or greater sensitivity than conventional mass spectrometers but in a fraction of the volume. The system is capable of operating at much higher pressures than traditional systems, so the need for additional differential pumping equipment is reduced.

The sensors are factory pre-tuned and calibrated against transfer standards which allows direct interchangeability of the sensor by the user without the need for technical expertise to calibrate.

micropole sensor        Micropole

 

It is possible to take data without a PC when you use the Monitor Controller with 3.5" LCD. Up to eight Micropole systems can be networked and controlled using RS-485 or Ethernet communication.

 

Product Features

  • Extremely compact size and lightweight - 1/20th size when compared to conventional residual gas analyzers makes it easy to integrate to your system.
  • High performance - Mini array of 9 quadrupoles gives excellent sensitivity at a fraction of the volume of traditional quadrupoles.
  • High pressure operation - Can be used at up to 0.9Pa (7mTorr, 9 x 10-3mbar) so in many applications in many application the need for expensive vacuum pumping is reduced or eliminated.
  • Interchangeable Sensor Head in calibration - The sensor heads are pre-tuned and calibrated prior to shipment allowing the user to make sensor changes in the field without the need for fine tuning or technical expertise.
  • Network Sensors - Up to eight sensors can be monitored by a single PC using RS-485. The systems can also be monitored remotely over Ethernet.
  • User friendly software - Micropole Scanner software allows the user to monitor partial pressures of gases in various modes e.g. trend graph, analog graph, leak mode, bar graph, 3D.
  • Monitor Controller - The optional Monitor Controller can be used on the chamber mounted directly on the Spectrum Generator, allowing the user to monitor the vacuum chamber without the need for a PC.

  Download the PDF datasheet from here!

 

micropole synopsis

 

As an integral part of the vacuum equipment, the Micropole™ qualifies tools for process and provides real time control of vacuum processes. By increasing tool uptime and reducing scrap products the Micropole™ helps improve productivity in manufacturing facilities. Typical applications of the Micropole™ mass spectrometer RGA : Semiconductor Wafer Fabrication - Physical Vapor Deposition - Magnetic/Optical Storage Media - Industrial Vacuum Processes - Vacuum Research and Development - Glass/Optical Coating - Particle Accelerators. The Micropole™ can double up as an on board helium leak detector and by using extra quadrupole heads can be used on other vacuum systems in the vicinity without breaking vacuum on the chambers it is mounted to. It is an economical way to have a leak detector capability that can be shared among several labs.

 

(This chart belongs to the old generation Micropole™ ! The new generation currently is available only for 65amu & 100amu)

PlasmGuard (SMPA)*

SMPA-1-2/45

SMPA-11-2/45

SMPA-7-2/65

SMPA-5-2/65

SMPA-5-2/100

SMPA-1-4/300

Micropole Analyzer (MPA)*

MPA6-1-2/45

MPA6-11-2/45

MPA6-7-2/65

MPA6-5-2/65

MPA6-5-2/100

MPA6-1-4/300

Mass Range (AMU)***

2~45

2~45

2~65

2~65

2~100

4~300

Resolution (FWHM)

0.5 AMU

1.5 AMU

0.9 AMU

0.8 AMU

1 AMU

1.5 AMU

Maximum Operating Pressure N2

0.133 Pa
1 mTorr

1.466 Pa
11 mTorr

0.933 Pa
7 mTorr

0.666 Pa
5 mTorr

0.666 Pa
5 mTorr

0.133 Pa
1 mTorr

Minimum Detectable Partial Pressure for Slow Scan Updates

1.33*10-8 Pa N2
1*10-10 Torr N2

Fastest Scan Updates / AMU

0.6 sec

Minimum Detectable He Leak Rate

2*10-9 Pa m3/sec
2*10-8 atm cm3/sec

2*10-8 Pa m3/sec
2*10-7 atm cm3/sec

2*10-9 Pa m3/sec
2*10-8 atm cm3/sec

Filament Material

Y2O3/lr (standard) or Pure W

Maximum Operating Temperature

150°C (Max. bake out temperature : 350°C

Flange

Type C: mini CF Flange
Type K : KF-16 Flange

Spectra Converter Type**

SC6-18

SC6-14

SC6-11

SC6-07

Digital Interface

RS232C / RS485 (Selected Baud Rate : 9,600 / 19,200 / 38,400

Software

WinMPA (Microsoft Windows XP, 2000, ME, NT4.0, 95/98)

 

* Micropole™ Analyzer has two types (MPA / SMPA). SMPA is protected by a mesh, on the vacuum fitting, designed to extend the lifetime of the sensor in harsh environments such as plasma processes.
** Chose electron energy, 70eV or 43eV through PC
*** AMU: Atomic Mass Unit 

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